METHOD AND SYSTEM FOR CORRECTION OF INTRINSIC BIREFRINGENCE IN UV MICROLITHOGRAPHY

Details for Australian Patent Application No. 2003254293 (hide)

Owner ASML HOLDING N.V.

Inventors SEWELL, Harry

Pub. Number AU-A-2003254293

PCT Number PCT/US03/24063

PCT Pub. Number WO2004/013674

Priority 10/304,995 27.11.02 US; 60/400,680 05.08.02 US

Filing date 4 August 2003

Wipo publication date 23 February 2004

International Classifications

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 007/00 Mountings, adjusting means, or light-tight connections, for optical elements

G02B 001/02 Optical elements characterised by the material of which they are made

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 10/304,995 27.11.02 US; 60/400,680 05.08.02 US

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003254293

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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