METHOD, SYSTEM, AND MEDIUM FOR HANDLING MISREPRESENTATIVE METROLOGY DATA WITHIN AN ADVANCED PROCESS CONTROL SYSTEM

Details for Australian Patent Application No. 2003254283 (hide)

Owner APPLIED MATERIALS, INC.

Inventors SCHWARM, Alexander, T.; SHANMUGASUNDRAM, Arulkumar, P.; SEROR, Jacques; KOKOTOV, Yuri; ENTIN, Efim

Pub. Number AU-A-2003254283

PCT Number PCT/US03/23964

PCT Pub. Number WO2004/013715

Priority 60/399,695 01.08.02 US

Filing date 1 August 2003

Wipo publication date 23 February 2004

International Classifications

G05B 023/02 Testing or monitoring of control systems or parts thereof - Electric testing or monitoring

G05B 015/02 Systems controlled by a computer - electric

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 60/399,695 01.08.02 US

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003254283

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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