AN IMPROVED SUBLIMATION BED EMPLOYING CARRIER GAS GUIDANCE STRUCTURES

Details for Australian Patent Application No. 2003254266 (hide)

Owner ASM AMERICA, INC.

Inventors SHERO, Eric, J.; GIVENS, Michael, E.; SCHMIDT, Ryan

Pub. Number AU-A-2003254266

PCT Number PCT/US03/23843

PCT Pub. Number WO2004/011695

Priority 60/400,210 30.07.02 US

Filing date 29 July 2003

Wipo publication date 16 February 2004

International Classifications

C23C 016/448 Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 60/400,210 30.07.02 US

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003254266

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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