PRESSURE CONTROLLED DEGAS SYSTEM FOR HOT CATHODE IONIZATION PRESSURE GAUGES

Details for Australian Patent Application No. 2003254153 (hide)

Owner MKS INSTRUMENTS, INC.

Inventors PEACOCK, Neil, T.; WADE, Stacy, W.

Pub. Number AU-A-2003254153

PCT Number PCT/US03/23169

PCT Pub. Number WO2004/011895

Priority 10/205,014 25.07.02 US

Filing date 25 July 2003

Wipo publication date 16 February 2004

International Classifications

G01L 021/32 Vacuum gauges

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 10/205,014 25.07.02 US

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003254153

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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