FLUORINATED POLYMERS, PHOTORESISTS AND PROCESSES FOR MICROLITHOGRAPHY

Details for Australian Patent Application No. 2003254112 (hide)

Owner E. I. DU PONT DE NEMOURS AND COMPANY

Inventors FEIRING, Andrew, Edward; SCHADT, Frank, Leonard, III; OGATA, Toshiyuki; ENDO, Koutaro

Pub. Number AU-A-2003254112

PCT Number PCT/US03/22912

PCT Pub. Number WO2004/011509

Priority 60/398,899 26.07.02 US

Filing date 23 July 2003

Wipo publication date 16 February 2004

International Classifications

C08F 114/18 Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen

G03F 007/038 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are rendered insoluble or differentially wettable

G03F 007/004 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Photosensitive materials

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 60/398,899 26.07.02 US

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003254112

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003254113-USER INTERFACE FOR REMOTE CONTROL OF MEDICAL DEVICES

2003254111-FLUOROPOLYMER MEMBRANE