SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER

Details for Australian Patent Application No. 2003254103 (hide)

Event Publications

30 October 2003 Complete Application Filed

Priority application(s): 10/200,818 22.07.02 US; 10/623,970 21.07.03 US; 10/623,970 21.07.03 US

18 March 2004 Application Open to Public Inspection

Published as AU-A-2003254103

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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