METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

Details for Australian Patent Application No. 2003253991 (hide)

Owner CELERITY GROUP, INC.

Inventors LULL, John, Michael; WANG, Chiun; SAGGIO, Joseph, A., Jr.

Pub. Number AU-A-2003253991

PCT Number PCT/US03/22435

PCT Pub. Number WO2004/010234

Priority 60/397,285 19.07.02 US

Filing date 17 July 2003

Wipo publication date 9 February 2004

International Classifications

G05B 013/04 Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion - involving the use of models or simulators

G05D 007/06 Control of flow - characterised by the use of electric means

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 60/397,285 19.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003253991

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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