MONOLITHIC SPUTTERING TARGET ASSEMBLY

Details for Australian Patent Application No. 2003253989 (hide)

Owner CABOT CORPORATION

Inventors FORD, Robert, B.; MICHALUK, Christopher, A.

Pub. Number AU-A-2003253989

PCT Number PCT/US03/22431

PCT Pub. Number WO2004/009866

Priority 60/397,418 19.07.02 US

Filing date 17 July 2003

Wipo publication date 9 February 2004

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 60/397,418 19.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003253989

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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