APPARATUS AND METHOD FOR BACKFILLING A SEMICONDUCTOR WAFER PROCESS CHAMBER

Details for Australian Patent Application No. 2003253873 (hide)

Owner ASML US, INC.

Inventors TORKAMAN, Amir

Pub. Number AU-A-2003253873

PCT Number PCT/US03/21641

PCT Pub. Number WO2004/007105

Priority 60/396,536 15.07.02 US; 60/428,526 22.11.02 US

Filing date 10 July 2003

Wipo publication date 2 February 2004

International Classifications

B08B 005/02 Cleaning by methods involving the use of air flow or gas flow - Cleaning by the force of jets, e.g. blowing-out cavities

B08B 005/04 Cleaning by methods involving the use of air flow or gas flow

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 60/396,536 15.07.02 US; 60/428,526 22.11.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003253873

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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