DEVICE AND METHOD FOR INSPECTING AN OBJECT

Details for Australian Patent Application No. 2003253422 (hide)

Owner LEICA MICROSYSTEMS SEMICONDUCTOR GMBH

Inventors DANNER, Lambert; GRAF, Uwe; MAINBERGER, Robert; SONKSEN, Dirk; KNORZ, Volker; CEMIC, Franz

Pub. Number AU-A-2003253422

PCT Number PCT/EP03/09274

PCT Pub. Number WO2004/019108

Priority 102 39 548.9 23.08.02 DE

Filing date 21 August 2003

Wipo publication date 11 March 2004

International Classifications

G02B 021/12 Microscopes

G01N 021/88 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating the presence of flaws, defects or contamination

G01N 021/95 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01N 021/956 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 102 39 548.9 23.08.02 DE

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003253422

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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