ZIRCONIUM COMPLEX USED FOR THE CVD METHOD AND PREPARATION METHOD OF A THIN FILM USING THEREOF

Details for Australian Patent Application No. 2003253257 (hide)

Owner SAES GETTERS S.p.A.

Inventors KOUJI, Yoda; YUZO, Tasaki

Pub. Number AU-A-2003253257

PCT Number PCT/IT03/00445

PCT Pub. Number WO2004/009867

Priority 2002-244354 22.07.02 JP

Filing date 18 July 2003

Wipo publication date 9 February 2004

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 2002-244354 22.07.02 JP

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003253257

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name SAES GETTERS S.p.A., Application No. 2003253257, under INID (71) correct the name to read SAES GETTERS S.p.A.; TOSHIMA MFG. CO. LTD.

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