MULTI DIRECTIONAL MECHANICAL SCANNING IN AN ION IMPLANTER

Details for Australian Patent Application No. 2003253089 (hide)

Owner APPLIED MATERIALS, INC.

Inventors NAYLOR-SMITH, Richard; DILLON, Simon, Frederick; COOKE, Richard

Pub. Number AU-A-2003253089

PCT Number PCT/GB03/02691

PCT Pub. Number WO2004/001789

Priority 0214384.0 21.06.02 GB

Filing date 20 June 2003

Wipo publication date 6 January 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 0214384.0 21.06.02 GB

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003253089

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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