Owner NFAB Limited

Inventors Eastham, Derek Anthony

Agent Callinan

Pub. Number AU-B-2003253085

PCT Number PCT/GB03/02560

PCT Pub. Number WO2003/107375

Priority 0300265.6 07.01.03 GB; 0303402.2 14.02.03 GB; 0302591.3 05.02.03 GB; 0219818.2 24.08.02 GB; 0213772.7 15.06.02 GB

Filing date 16 June 2003

Wipo publication date 31 December 2003

Acceptance publication date 20 November 2008

G21K 1/00 (2006.01) Arrangements for handling radiation or particles, e.g. focusing, moderating

H01J 37/06 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron sources

H01J 37/12 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 37/26 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron or ion microscopes

H01J 37/28 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams

H01J 37/317 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation