DEVICE FOR PRODUCTION OF A PLASMA SHEET

Details for Australian Patent Application No. 2003253064 (hide)

Owner CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)

Inventors LAGARDE, Thierry, Leon; LACOSTE, Ana; PELLETIER, Jacques; ARNAL, Yves, Alban-Marie

Pub. Number AU-A-2003253064

PCT Number PCT/FR03/01661

PCT Pub. Number WO2003/103003

Priority 02/06837 04.06.02 FR

Filing date 3 June 2003

Wipo publication date 19 December 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H05H 001/46 Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 02/06837 04.06.02 FR

12 February 2004 Application Open to Public Inspection

  Published as AU-A-2003253064

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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