THREE-DIMENSIONAL STRUCTURE ELEMENT AND METHOD OF MANUFACTURING THE ELEMENT, OPTICAL SWITCH, AND MICRO DEVICE

Details for Australian Patent Application No. 2003252755 (hide)

Owner NIKON CORPORATION

Inventors ISHIZUYA, Tohru

Pub. Number AU-A-2003252755

PCT Number PCT/JP03/09734

PCT Pub. Number WO2004/013037

Priority 2002-224530 01.08.02 JP

Filing date 31 July 2003

Wipo publication date 23 February 2004

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

G02B 026/02 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the intensity of light

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 2002-224530 01.08.02 JP

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003252755

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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