POLISHING DEVICE

Details for Australian Patent Application No. 2003252687 (hide)

Owner NIKON CORPORATION

Inventors ARIIZUMI, Eiji; ARAI, Hiroshi; UDA, Yutaka

Pub. Number AU-A-2003252687

PCT Number PCT/JP03/09431

PCT Pub. Number WO2004/012249

Priority 2002-218646 26.07.02 JP

Filing date 25 July 2003

Wipo publication date 16 February 2004

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24B 037/00 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped

B24B 057/02 Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 2002-218646 26.07.02 JP

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003252687

28 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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