OPTICAL IMAGING USING A PUPIL FILTER AND COORDINATED ILLUMINATION POLARISATION

Details for Australian Patent Application No. 2003252135 (hide)

Owner MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventors SHAVER, David, C.

Pub. Number AU-A-2003252135

PCT Number PCT/US03/23071

PCT Pub. Number WO2004/012013

Priority 60/398,659 26.07.02 US

Filing date 24 July 2003

Wipo publication date 16 February 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/398,659 26.07.02 US

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003252135

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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