CONTROLLING THE CHARACTERISTICS OF RIBBON-SHAPED IMPLANTER ION-BEAMS

Details for Australian Patent Application No. 2003251973 (hide)

Owner VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

Inventors TURNER, Norman, L.; PURSER, Kenneth, H.; ENGE, Harald, A.

Pub. Number AU-A-2003251973

PCT Number PCT/US03/22311

PCT Pub. Number WO2004/008476

Priority 60/396,322 17.07.02 US

Filing date 17 July 2003

Wipo publication date 2 February 2004

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

H01J 037/147 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Arrangements for directing or deflecting the discharge along a desired path

H01J 037/14 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/396,322 17.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003251973

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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