GRATING BASED SPECTRAL FILTER FOR ELIMINATING OUT OF BAND RADIATION IN AN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM

Details for Australian Patent Application No. 2003251669 (hide)

Owner CARL ZEISS SMT AG

Inventors SINGER, Wolfgang

Pub. Number AU-A-2003251669

PCT Number PCT/EP03/08413

PCT Pub. Number WO2004/021086

Priority 102 39 732.5 26.08.02 DE

Filing date 30 July 2003

Wipo publication date 19 March 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 005/18 Optical elements other than lenses - Diffracting gratings

G01J 003/18 Spectrometry

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 102 39 732.5 26.08.02 DE

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003251669

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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