METHOD AND SYSTEM FOR ELECTRON DENSITY MEASUREMENT

Details for Australian Patent Application No. 2003251605 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors STRANG, Eric, J.; PARSONS, Richard; GOLDFIELD, Jody

Pub. Number AU-A-2003251605

PCT Number PCT/US03/19872

PCT Pub. Number WO2004/010151

Priority 60/397,661 23.07.02 US

Filing date 23 July 2003

Wipo publication date 9 February 2004

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/397,661 23.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003251605

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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