PLASMA REACTOR FOR CARRYING OUT GAS REACTIONS AND METHOD FOR THE PLASMA-SUPPORTED REACTION OF GASES

Details for Australian Patent Application No. 2003251444 (hide)

Owner IPLAS GMBH

Inventors SPITZL, Ralf; BEHR, Arno; WOLFF, Christian; OBERREUTHER, Thorsten

Pub. Number AU-A-2003251444

PCT Number PCT/EP03/07993

PCT Pub. Number WO2004/010454

Priority 102 33 538.9 23.07.02 DE

Filing date 22 July 2003

Wipo publication date 9 February 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 102 33 538.9 23.07.02 DE

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003251444

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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