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Details for Australian Patent Application No. 2003251281 (hide)

Owner INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING

Inventors ZHANG, Fan; MING, Li

Pub. Number AU-A-2003251281

PCT Number PCT/SG03/00154

PCT Pub. Number WO2004/004003

Priority 200203893-3 27.06.02 SG

Filing date 26 June 2003

Wipo publication date 19 January 2004

International Classifications

H01L 023/485 Details of semiconductor or other solid state devices

H01L 021/44 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 200203893-3 27.06.02 SG

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003251281

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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