HOLDER FOR FLAT WORKPIECES, IN PARTICULAR SEMICONDUCTOR WAFERS FOR MECHANOCHEMICAL POLISHING

Details for Australian Patent Application No. 2003250921 (hide)

Owner PETER WOLTERS SURFACE TECHNOLOGIES GMBH AND CO. KG

Inventors KEIPKE, Roy; GRIPP, Howe

Pub. Number AU-A-2003250921

PCT Number PCT/EP03/07376

PCT Pub. Number WO2005/005101

Filing date 9 July 2003

Wipo publication date 28 January 2005

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 041/06 Component parts of general applicability for grinding machines or devices - Work supports, e.g. adjustable steadies

Event Publications

16 October 2003 Complete Application Filed

10 March 2005 Application Open to Public Inspection

  Published as AU-A-2003250921

23 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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