SPUTTERING CATHODE, PRODUCTION METHOD AND CORRESPONDING CATHODE

Details for Australian Patent Application No. 2003250728 (hide)

Owner UMICORE MATERIALS AG

Inventors LEITNER, Klaus; HIERMER, Andreas, M., R.

Pub. Number AU-A-2003250728

PCT Number PCT/CH03/00580

PCT Pub. Number WO2004/023515

Priority 1501/02 03.09.02 CH

Filing date 27 August 2003

Wipo publication date 29 March 2004

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 1501/02 03.09.02 CH

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2003250728

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003250729-ASSEMBLY COMPRISING AN IMPLANT FOR THE SUSTAINED RELEASE OF AN ACTIVE SUBSTANCE

2003250727-Method for automated generation of access controlled, personalized data and/ or programs