PLASMA SURFACE PROCESSING SYSTEM AND SUPPLY DEVICE FOR PLASMA PROCESSING SOLUTION THEREFOR

Details for Australian Patent Application No. 2003250554 (hide)

Owner LG ELECTRONICS INC.

Inventors JEONG, Young-Man; OH, Jung-Geun

Pub. Number AU-A-2003250554

PCT Number PCT/KR03/01451

PCT Pub. Number WO2005/007928

Filing date 22 July 2003

Wipo publication date 4 February 2005

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

Event Publications

16 October 2003 Complete Application Filed

17 March 2005 Application Open to Public Inspection

  Published as AU-A-2003250554

6 April 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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