APPARATUS FOR CONTROLLING THE PRESSURE IN A PROCESS CHAMBER AND METHOD OF OPERATING SAME

Details for Australian Patent Application No. 2003250377 (hide)

Owner THE BOC GROUP PLC

Inventors TOLLNER, Martin, Ernst

Pub. Number AU-A-2003250377

PCT Number PCT/GB03/02690

PCT Pub. Number WO2004/001230

Priority 0214273.5 20.06.02 GB

Filing date 20 June 2003

Wipo publication date 6 January 2004

International Classifications

F04D 019/04 Axial-flow pumps specially adapted for elastic fluids

F04C 029/00 Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups

G01N 015/02 Investigating characteristics of particles - Investigating particle size or size distribution

G05D 016/20 Control of fluid pressure - characterised by the use of electric means

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 0214273.5 20.06.02 GB

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003250377

14 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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