DEVICE FOR CLEANING WAFERS AFTER A CMP PROCESS

Details for Australian Patent Application No. 2003250002 (hide)

Owner RENA SONDERMASCHINEN GMBH

Inventors WEBER, Martin; BURGER, Norbert

Pub. Number AU-A-2003250002

PCT Number PCT/EP03/07373

PCT Pub. Number WO2005/006409

Filing date 9 July 2003

Wipo publication date 28 January 2005

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

10 March 2005 Application Open to Public Inspection

  Published as AU-A-2003250002

23 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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