LIGHTING DEVICE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM

Details for Australian Patent Application No. 2003249967 (hide)

Owner CARL ZEISS SMT AG

Inventors FIOLKA, Damian; BROTSACK, Markus; DIECKMANN, Nils

Pub. Number AU-A-2003249967

PCT Number PCT/EP03/07258

PCT Pub. Number WO2005/006079

Filing date 7 July 2003

Wipo publication date 28 January 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 October 2003 Complete Application Filed

10 March 2005 Application Open to Public Inspection

  Published as AU-A-2003249967

23 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003249968-PAIR OF FRONT AND REAR PNEUMATIC TIRES FOR MOTORCYCLES AND METHOD OF IMPROVING THE PERFORMANCE ON BOTH WET AND DRY GROUND OF A MOTORCYCLE EQUIPPED WITH SAID PAIR

2003249966-Combinations of cyclohexanedione oxime herbicides and safeners