LITHOGRAPHY LASER WITH BEAM DELIVERY AND BEAM POINTING CONTROL

Details for Australian Patent Application No. 2003249614 (hide)

Event Publications

16 October 2003 Complete Application Filed

Priority application(s): 10/141,216 07.05.02 US; 10/233,253 30.08.02 US; 10/255,806 25.09.02 US; 60/443,673 28.01.03 US; 10/425,361 29.04.03 US

5 February 2004 Application Open to Public Inspection

Published as AU-A-2003249614

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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