METHOD AND APPARATUS FOR PICKING UP SEMICONDUCTOR CHIP AND SUCTION AND EXFOLIATION TOOL UP THEREFOR

Details for Australian Patent Application No. 2003249592 (hide)

Owner MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD

Inventors OZONO, Mitsuru; KASAI, Teruaki

Pub. Number AU-A-2003249592

PCT Number PCT/JP03/08733

PCT Pub. Number WO2004/008499

Priority 2002-208382 17.07.02 US; 2002-254310 30.08.02 US

Filing date 9 July 2003

Wipo publication date 2 February 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 2002-208382 17.07.02 US; 2002-254310 30.08.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003249592

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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