APPARATUS AND METHOD FOR THERMALLY CONTROLLED PROCESSING OF MICROELECTRONIC WORKPIECES

Details for Australian Patent Application No. 2003249286 (hide)

Owner SEMITOOL, INC.

Inventors HANSON, Kyle, M.; BATZ, Robert, Jr., W.; BASKARAN, Rajesh; ZIMMERMAN, Nolan; HU, Zhongmin; WILSON, Gregory, J.; MCHUGH, Paul, R.

Pub. Number AU-A-2003249286

PCT Number PCT/US03/22174

PCT Pub. Number WO2004/007090

Priority 60/396,478 16.07.02 US; 10/295,302 15.11.02 US

Filing date 15 July 2003

Wipo publication date 2 February 2004

International Classifications

B05C 003/02 Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material - the work being immersed in the liquid or other fluent material

B05C 003/18 Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material

B05D 001/18 Processes for applying liquids or other fluent materials - performed by dipping

B05D 003/00 Pretreatment of surfaces to which liquids or other fluent materials are to be applied

B05D 003/12 Pretreatment of surfaces to which liquids or other fluent materials are to be applied - by mechanical means

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/396,478 16.07.02 US; 10/295,302 15.11.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003249286

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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