METAL ORGANIC CHEMICAL VAPOR DEPOSITION AND ATOMIC LAYER DEPOSITION OF METAL OXYNITRIDE AND METAL SILICON OXYNITRIDE

Details for Australian Patent Application No. 2003249254 (hide)

Event Publications

16 October 2003 Complete Application Filed

Priority application(s): 60/396,744 19.07.02 US

18 March 2004 Application Open to Public Inspection

Published as AU-A-2003249254

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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