HIGH TEMPERATURE ANISOTROPIC ETCHING OF MULTI-LAYER STRUCTURES

Details for Australian Patent Application No. 2003249182 (hide)

Owner UNAXIS USA, INC.

Inventors YAO-SHENG, Lee

Pub. Number AU-A-2003249182

PCT Number PCT/US03/21830

PCT Pub. Number WO2004/010486

Priority 60/397,185 19.07.02 US; 10/616,492 08.07.03 US

Filing date 9 July 2003

Wipo publication date 9 February 2004

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/397,185 19.07.02 US; 10/616,492 08.07.03 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003249182

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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