SERVOMOTOR CONTROL SYSTEM AND METHOD IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

Details for Australian Patent Application No. 2003249030 (hide)

Event Publications

16 October 2003 Complete Application Filed

Priority application(s): 60/428,526 22.11.02 US; 60/396,536 15.07.02 US

18 March 2004 Application Open to Public Inspection

Published as AU-A-2003249030

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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