WORKPIECE CHUCK WITH TEMPERATURE CONTROL ASSEMBLY HAVING SPACERS BETWEEN LAYERS PROVIDING CLEARANCE FOR THERMOELECTRIC MODULES
Details for Australian Patent Application No. 2003248918 (hide)
International Classifications
Event Publications
16 October 2003 Complete Application Filed
Priority application(s): 10/193,361 11.07.02 US; 60/448,203 18.02.03 US
18 March 2004 Application Open to Public Inspection
Published as AU-A-2003248918
7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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