ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN ION BEAM IMPLANTER

Details for Australian Patent Application No. 2003248915 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors FERRARA, Joseph

Pub. Number AU-A-2003248915

PCT Number PCT/US03/21527

PCT Pub. Number WO2004/006283

Priority 10/192,344 10.07.02 US

Filing date 10 July 2003

Wipo publication date 23 January 2004

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

H01J 037/20 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 10/192,344 10.07.02 US

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003248915

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003248916-ELECTRONIC CIRCUIT AND METHOD OF SUPPLYING ENERGY TO A HIGH-PRESSURE GASDISCHARGE LAMP

2003248914-SEAL ASSEMBLY WITH ACCUMULATOR RING