METHOD OF MAKING STRESSRESISTANT ANTI-REFLECTION MULTILAYER COATINGS CONTAINING CERIUM OXIDE

Details for Australian Patent Application No. 2003248885 (hide)

Owner DENGLAS TECHNOLOGIES, L.L.C.

Inventors ARFSTEN, Nanning, J.

Pub. Number AU-A-2003248885

PCT Number PCT/US03/21409

PCT Pub. Number WO2004/005975

Priority 60/394,766 10.07.02 US

Filing date 10 July 2003

Wipo publication date 23 January 2004

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/394,766 10.07.02 US

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003248885

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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