ADVANCED CHEMICAL MECHANICAL POLISHING SYSTEM WITH SMART ENDPOINT DETECTION
Details for Australian Patent Application No. 2003248673 (hide)
International Classifications
Event Publications
16 October 2003 Complete Application Filed
Priority application(s): 60/414,579 27.09.02 US; 60/417,544 10.10.02 US; 10/321,150 17.12.02 US; 60/436,108 23.12.02 US; 60/436,706 27.12.02 US; 10/052,475 17.01.02 US; 60/365,016 12.03.02 US; 10/105,016 22.03.02 US; 10/197 090 15.07.02 US; 60/397,110 19.07.02 US
23 October 2003 Application Open to Public Inspection
Published as AU-A-2003248673
7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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