ADVANCED CHEMICAL MECHANICAL POLISHING SYSTEM WITH SMART ENDPOINT DETECTION

Details for Australian Patent Application No. 2003248673 (hide)

Owner NUTOOL, INC.

Inventors WANG, Yuchun; FREY, Bernard, M.; BASOL, Bulent, M.; TALIEH, Homayoun; YOUNG, Douglas; MCGRATH, Bret, E.; DESAI, Mukesh; VELAZQUEZ, Efrain; TRUONG, Tuan

Pub. Number AU-A-2003248673

PCT Number PCT/US03/01704

PCT Pub. Number WO2003/074228

Priority 60/414,579 27.09.02 US; 60/417,544 10.10.02 US; 10/321,150 17.12.02 US; 60/436,108 23.12.02 US; 60/436,706 27.12.02 US; 10/052,475 17.01.02 US; 60/365,016 12.03.02 US; 10/105,016 22.03.02 US; 10/197 090 15.07.02 US; 60/397,110 19.07.02 US

Filing date 17 January 2003

Wipo publication date 16 September 2003

International Classifications

B24B 001/00

B24B 049/02 Measuring - according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent

B24B 049/12 Measuring - involving optical means

B24B 049/16 Measuring - taking regard of the load

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/414,579 27.09.02 US; 60/417,544 10.10.02 US; 10/321,150 17.12.02 US; 60/436,108 23.12.02 US; 60/436,706 27.12.02 US; 10/052,475 17.01.02 US; 60/365,016 12.03.02 US; 10/105,016 22.03.02 US; 10/197 090 15.07.02 US; 60/397,110 19.07.02 US

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003248673

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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