PERFORATED PLATE FOR WAFER CHUCK

Details for Australian Patent Application No. 2003248610 (hide)

Owner SYSTEMS ON SILICON MANUFACTURING CO. PTE. LTD.

Inventors WANG, Bing; KOH MENG FEI; POH CHOON SIONG; NEO TECK LEONG; LEONG THENG WEI

Pub. Number AU-A-2003248610

PCT Number PCT/SG03/00170

PCT Pub. Number WO2005/005096

Filing date 14 July 2003

Wipo publication date 28 January 2005

International Classifications

B23Q 003/08 Devices holding, supporting, or positioning, work or tools, of a kind normally removable from the machine - other than mechanically-actuated

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B28D 005/00 Fine working of gems, jewels, crystals, e.g. of semiconductor material

B28D 007/04 Accessories specially adapted for use with machines or devices of the other groups of this subclass

B25B 011/00 Work holders or positioners not covered by groups , e.g. magnetic work holders, vacuum work holders

B24B 041/06 Component parts of general applicability for grinding machines or devices - Work supports, e.g. adjustable steadies

Event Publications

16 October 2003 Complete Application Filed

10 March 2005 Application Open to Public Inspection

  Published as AU-A-2003248610

30 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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