METHOD FOR FORMING A RELEASED MICROSTRUCTURE SUITABLE FOR A MICROELECTROMECHANICAL DEVICE

Details for Australian Patent Application No. 2003248599 (hide)

Owner INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING

Inventors TANG, Xiaosong; CHUA, Bee, Lee; LI, Zhihong; NORMAN, C. Tien; TAY, Eng Hock, Francis

Pub. Number AU-A-2003248599

PCT Number PCT/SG03/00141

PCT Pub. Number WO2003/104141

Priority 200203408-0 10.06.02 SG

Filing date 10 June 2003

Wipo publication date 22 December 2003

International Classifications

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 200203408-0 10.06.02 SG

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2003248599

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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