METHOD FOR ALIGNING A SUBSTRATE ON A STAGE

Details for Australian Patent Application No. 2003248586 (hide)

Owner MICRONIC LASER SYSTEMS AB

Inventors RADAHL, Simon

Pub. Number AU-A-2003248586

PCT Number PCT/SE03/01260

PCT Pub. Number WO2004/019135

Priority 0202505-4 23.08.02 SE

Filing date 11 August 2003

Wipo publication date 11 March 2004

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 0202505-4 23.08.02 SE

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003248586

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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