ION IMPLANTATION SYSTEM HAVING AN ENERGY PROBE

Details for Australian Patent Application No. 2003248569 (hide)

Owner IBIS TECHNOLOGY CORPORATION

Inventors RICHARDS, Steven

Pub. Number AU-A-2003248569

PCT Number PCT/US03/16388

PCT Pub. Number WO2003/103002

Priority 10/157,091 29.05.02 US

Filing date 27 May 2003

Wipo publication date 19 December 2003

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

G01R 015/04 Details of measuring arrangements of the types provided for in groups , and

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 10/157,091 29.05.02 US

12 February 2004 Application Open to Public Inspection

  Published as AU-A-2003248569

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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