PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003248343 (hide)

Owner FUJITSU LIMITED TOKYO ELECTRON LIMITED

Inventors KUDO, Hiroshi; INAZAWA, Koichiro

Pub. Number AU-A-2003248343

PCT Number PCT/JP03/00691

PCT Pub. Number WO2003/073498

Priority 2002-54304 28.02.02 JP

Filing date 24 January 2003

Wipo publication date 9 September 2003

International Classifications

H01L 021/3205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 October 2003 Complete Application Filed

  Priority application(s): 2002-54304 28.02.02 JP

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003248343

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003248343

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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