SURFACE TREATING METHOD FOR SUBSTRATE

Details for Australian Patent Application No. 2003248256 (hide)

Owner TSUKISHIMA KIKAI CO.,LTD TAKAKUWA, Yuji

Inventors TAKAKUWA, Yuji

Pub. Number AU-A-2003248256

PCT Number PCT/JP03/08722

PCT Pub. Number WO2004/008510

Priority 2002-201148 10.07.02 JP

Filing date 9 July 2003

Wipo publication date 2 February 2004

International Classifications

H01L 021/318 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/48 Chemical deposition or plating by decomposition - by irradiation, e.g. photolysis, radiolysis, particle radiation

G11B 005/84 Recording by magnetisation or demagnetisation of a record carrier - Processes or apparatus specially adapted for manufacturing record carriers

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G11B 005/39 Recording by magnetisation or demagnetisation of a record carrier - using magneto-resistive devices

C23C 016/27 Chemical deposition or plating by decomposition

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 October 2003 Complete Application Filed

  Priority application(s): 2002-201148 10.07.02 JP

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003248256

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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