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Details for Australian Patent Application No. 2003248251 (hide)

Owner NIKON CORPORATION

Inventors TAKI, Yusuke

Pub. Number AU-A-2003248251

PCT Number PCT/JP03/08704

PCT Pub. Number WO2004/006310

Priority 2002-199479 09.07.02 JP

Filing date 9 July 2003

Wipo publication date 23 January 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 001/10 Optical elements characterised by the material of which they are made - Optical coatings produced by application to, or surface treatment of, optical elements

Event Publications

9 October 2003 Complete Application Filed

  Priority application(s): 2002-199479 09.07.02 JP

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003248251

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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