TWO-DIMENSIONAL LIGHTMODULATING NANO/MICRO APERTURE ARRAY AND HIGH-SPEED NANO PATTERN RECORDING SYSTEM UTILIZED WITH THE ARRAY

Details for Australian Patent Application No. 2003248145 (hide)

Owner HAHN, Jae Won

Inventors HAHN, Jae Won

Pub. Number AU-A-2003248145

PCT Number PCT/KR03/01387

PCT Pub. Number WO2005/001914

Priority 10-2003-0042649 27.06.03 KR

Filing date 14 July 2003

Wipo publication date 13 January 2005

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 10-2003-0042649 27.06.03 KR

24 February 2005 Application Open to Public Inspection

  Published as AU-A-2003248145

16 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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