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Details for Australian Patent Application No. 2003248121 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors CHOUNO, Yasuhiro; ITOH, Norihiro

Pub. Number AU-A-2003248121

PCT Number PCT/JP03/09471

PCT Pub. Number WO2004/012259

Priority 2002-216123 25.07.02 JP

Filing date 25 July 2003

Wipo publication date 16 February 2004

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B65G 049/07 Conveying systems characterised by their application for specified purposes not otherwise provided for - for semiconductor wafers

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 2002-216123 25.07.02 JP

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003248121

14 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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