METHOD FOR PROCESSING SOI SUBSTRATE

Details for Australian Patent Application No. 2003248065 (hide)

Owner DISCO CORPORATION

Inventors TAKAHASHI, Toshiaki; ARAI, Kazuhisa

Pub. Number AU-A-2003248065

PCT Number PCT/JP03/08895

PCT Pub. Number WO2004/010504

Priority 2002-215000 24.07.02 JP

Filing date 14 July 2003

Wipo publication date 9 February 2004

International Classifications

H01L 027/12 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being other than a semiconductor body, e.g. an insulating body

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 2002-215000 24.07.02 JP

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003248065

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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