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Details for Australian Patent Application No. 2003247868 (hide)

Owner KLA-TENCOR TECHNOLOGIES CORP.

Inventors PETERSON, Ingrid, B.; VON DEN HOFF, Mike; WILEY, Jim

Pub. Number AU-A-2003247868

PCT Number PCT/US03/21907

PCT Pub. Number WO2004/008244

Priority 60/396,197 15.07.02 US; 60/485,233 07.07.03 US

Filing date 15 July 2003

Wipo publication date 2 February 2004

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 60/396,197 15.07.02 US; 60/485,233 07.07.03 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003247868

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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