CYCLIC ERROR COMPENSATION IN INTERFEROMETRY SYSTEMS

Details for Australian Patent Application No. 2003247779 (hide)

Owner ZYGO CORPORATION

Inventors HILL, Henry, A.

Pub. Number AU-A-2003247779

PCT Number PCT/US03/21000

PCT Pub. Number WO2004/005847

Priority 60/394,418 08.07.02 US

Filing date 8 July 2003

Wipo publication date 23 January 2004

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 60/394,418 08.07.02 US

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003247779

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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